Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
Language: English
Published by Springer Vieweg, 2023
- Softcover
- New
Seller: Basi6 International, Irving, TX, U.S.A.Basi6 International
AbeBooks seller since June 24, 2016
Condition: New
US$ 81.72
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- Title
- Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
- Author
- Ulrich Hilleringmann
- Publisher
- Springer Vieweg
- Publication year
- 2023
- Condition
- Brand New
- Binding
- Soft cover
- Language
- English
- ISBN 10
- 365841040X
- ISBN 13
- 9783658410407
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.
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Basi6 International
Irving, TX, U.S.A.
AbeBooks seller since June 24, 2016
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