Size Dependence of Photolithographic Defect Density Distribution; and, A Method for LSI Modeling and Process Monitoring (Two Monographs) [plus related documents]

Stapper, Charles H.; D. R. Thomas; and R. H. Dennard

Published by Charles H. Stapper, 1975

About this Item

Sheets stapled at top corner. Two monograph copies. These appears to be preliminary version of these papers on IC yields. "Size Dependence." is authored by Stapper, Thomas, and Dennard, and is 16 single-sided sheets. "Method." is authored by Stapper, and is 26 single-sided sheets. Also included are two letters dated June 24 and August 29, 1975; from Stapper to another industry expert concerning feedback about the papers. Rust stains from paper-clips at the top edges. Else a bit age-toned, but clean. ; 27C; 11" x 8-1/2".

Seller Inventory # 62381

Bibliographic Details

• Title: Size Dependence of Photolithographic Defect Density Distribution; and, A Method for LSI Modeling and Process Monitoring (Two Monographs) [plus related documents]
• Publisher: Charles H. Stapper
• Publication Date: 1975
• Binding: Stapled sheets
• Condition: Very Good-
• Dust Jacket Condition: No Dust Jacket