Proceedings from the September 1998 symposium feature 71 contributions that cover aspects of ultra-clean Si-technology and show that the rinse step in the cleaning of silicon wafers likely results in recontamination by dissolved metal ions. Topics include cleaning, contamination control, Si-surface chemistry and topography, cleaning at the interconnect level, resist strip and polymer removal, contamination aspects of metallization, wafer backside cleaning, and cleaning after chemical-mechanical polishing. Book News, Inc.�, Portland, OR

"About this title" may belong to another edition of this title.

Store Description

We have collection of General books ,Science Books, Fiction & Academic Books. we ship from multiple location. Delhi, US and UK Return Address Mispah books flat4 , Centenary court, 30 Warwick Road Redhill , SURRE RH1 1FQ United Kingdom

Visit Seller's Storefront

Seller's business information

Mispah books
United Kingdom

Sale & Shipping Terms

Terms of Sale

We offer excellent customer service & easy return facility.

we ship from Multiple location,UK,India,US

Return address:

Mispah books
flat4 ,
Centenary court, 30 Warwick Road
Redhill , SURRE RH1 1FQ
United Kingdom

Shipping Terms

Our rates depends on weight of the item & shipping destination

Shipping rates from United Kingdom to U.S.A.

Shipping rates from United Kingdom to U.S.A.
Order quantity	14 to 15 business days	9 to 10 business days
First item	US$ 33.56	US$ 36.25

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.