Eric Garfunkel (36 results)
Language: English
Published by Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Hardcover. Condition: Very Good. AS NEW: Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices HC 1998 Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (NATO Science Partnership Subseries: 3, 47) 1998th Edition by Eric Garfunkel (Editor), Evgeni Gusev (Editor), Alexander Vul' (Editor) OUR REFERENCE:128…B3-0792350073-HC-2P2-lb-Wht-B45 DESCRIPTION An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of <3 nm will be required in the near future. Given the importance of ultrathin gate dielectrics, well-focused basic scientific research and aggressive development programs must continue on the silicon oxide, oxynitride, and high K materials on silicon systems, especially in the critical, ultrathin 1-3 nm regime. The main thrust of the present book is a review, at the nano and atomic scale, the complex scientific issues related to the use of ultrathin dielectrics in next-generation Si-based devices. The contributing authors are leading scientists, drawn from academic, industrial and government laboratories throughout the world, and representing such backgrounds as basic and applied physics, chemistry, electrical engineering, surface science, and materials science. Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology. Product details Publisher ‏ : ‎ Springer; 1998th edition (March 31, 1998) Language ‏ : ‎ English Hardcover ‏ : ‎ 518 pages ISBN-10 ‏ : ‎ 0792350073 ISBN-13 ‏ : ‎ 978-0792350071.
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Condition: Good. Your purchase helps support Sri Lankan Children's Charity 'The Rainbow Centre'. Ex-library, so some stamps and wear, but in good overall condition. Our donations to The Rainbow Centre have helped provide an education and a safe haven to hundreds of children who live in appalling conditions.
Language: English
Published by Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Softcover
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Language: English
Published by Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Language: English
Published by Kluwer Academic Publishers, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Condition: New. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997 Editor(s): Garfunkel, Eric; Gusev, Evgeni; Vul', Alexander Ya. Series: NATO Science Partnership Subseries: 3. Num…Pages: 507 pages, 114 black & white illustrations, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 244 x 170 x 28. Weight in Grams: 962. . 1998. Hardback. . . . .
Language: English
Published by Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Condition: New. pp. 524.
Language: English
Published by Kluwer Academic Publishers, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Softcover
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Condition: New. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997 Editor(s): Garfunkel, Eric; Gusev, Evgeni; Vul', Alexander Ya. Series: NATO Science Partnership Subseries: 3. Num…Pages: 507 pages, 114 black & white illustrations, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 240 x 160 x 26. Weight in Grams: 1590. . 1998. Softcover reprint of the original 1st ed. 1998. Paperback. . . . .
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Gusev, Evgeni (EDT); Garfunkel, Eric (EDT); Dideikin, Arthur (EDT)
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
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Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Softcover
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Condition: Sehr gut. Zustand: Sehr gut | Seiten: 314 | Sprache: Englisch | Produktart: Bücher | A NATO Advanced Research Workshop (ARW) entitled "Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators" was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was t…o examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Language: English
Published by Springer, Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Softcover
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Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more… about the exciting basic research issues relevant to next-generation device technology.
Language: English
Published by Springer Netherlands, Springer Netherlands, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about…the exciting basic research issues relevant to next-generation device technology.
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Gusev, Evgeni (EDT); Garfunkel, Eric (EDT); Dideikin, Arthur (EDT)
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Softcover
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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Gusev, Evgeni (EDT); Garfunkel, Eric (EDT); Dideikin, Arthur (EDT)
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Language: English
Published by Kluwer Academic Publishers, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Condition: New. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997 Editor(s): Garfunkel, Eric; Gusev, Evgeni; Vul', Alexander Ya. Series: NATO Science Partnership Subseries: 3. Num…Pages: 507 pages, 114 black & white illustrations, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 244 x 170 x 28. Weight in Grams: 962. . 1998. Hardback. . . . . Books ship from the US and Ireland.
Language: English
Published by Kluwer Academic Publishers, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Softcover
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Condition: New. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997 Editor(s): Garfunkel, Eric; Gusev, Evgeni; Vul', Alexander Ya. Series: NATO Science Partnership Subseries: 3. Num…Pages: 507 pages, 114 black & white illustrations, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 240 x 160 x 26. Weight in Grams: 1590. . 1998. Softcover reprint of the original 1st ed. 1998. Paperback. . . . . Books ship from the US and Ireland.
Language: English
Published by Springer Netherlands, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Condition: Sehr gut. Zustand: Sehr gut | Seiten: 328 | Sprache: Englisch | Produktart: Bücher | A NATO Advanced Research Workshop (ARW) entitled ¿Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators¿ was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was t…o examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Gusev, Evgeni (EDT); Garfunkel, Eric (EDT); Dideikin, Arthur (EDT)
Language: English
Published by Springer, 2010
Series: Book 2 of 32 - NATO Science for Peace and Security Series B: Physics and Biophysics
- Hardcover
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Language: English
Published by Springer, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
- Hardcover
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Language: English
Published by Springer, Springer, 2010
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- Hardcover
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Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - A NATO Advanced Research Workshop (ARW) entitled 'Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators' was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a funda…mental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Gusev, Evgeni (Edited by)/ Garfunkel, Eric (Edited by)/ Dideikin, Arthur (Edited by)
Language: English
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Published by Springer, 2010
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Language: English
Published by Springer, Springer Mär 1998, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
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Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wi…sh to learn more about the exciting basic research issues relevant to next-generation device technology. 520 pp. Englisch.
Language: English
Published by Springer Netherlands, 1998
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Gebunden. Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997 An extr…apolation of ULSI scaling trends indicates .
Language: English
Published by Springer Netherlands, 1998
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Kartoniert / Broschiert. Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-…8, 1997 An extrapolation of ULSI scaling trends indicates .
Language: English
Published by Springer, Springer Mär 1998, 1998
Series: Book 16 of 26 - Nato Science Partnership Subseries: 3
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Taschenbuch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Ultrathin dielectrics in silicon microelectronics - an overview.- Section 1. Recent advances in experimental studies of SiO2films on Si.- Study of the Si/SiO2interface using positrons: present status and prospects.- Medium energy ion sc…attering studies of silicon oxidation and oxynitridation.- Synchrotron and conventional photoemission studies of oxides and N2Ooxynitrides.- Stress in the SiO2/Si structures formed by thermal oxidation.- Section 2. Theory of the SiO2/Si and SiOxNy/Si systems.- Modeling the oxide and the oxidation process: can silicon oxidation be solved .- Core-level shifts in Si(001)-SiO2systems: the value of first-principle investigations.- A simple model of the chemical nature of bonds at the Si-SiO2interface and its influence on the electronic properties of MOS devices.- Chemical perspectives on growth and properties of ultrathin SiO2layers.- A theoretical model of the Si/SiO2interface.- Section 3: Growth mechanism processing and analysis of (oxy)nitridation.- Spatially-selective incorporation of bonded-nitrogen into ultra-thin gate dielectrics by low-temperature plasma-assisted processing.- Isotopic labeling studies of oxynitridation in nitric oxide (NO) of Si and SiO2.- Thermal routes to ultrathin oxynitrides.- Nitrogen in ultra thin dielectrics.- Endurance of EEPROM-cells using ultrathin NO and NH3nitrided tunnel oxides.- Effects of the surface deposition of nitrogen on the oxidation of silicon.- Section 4: Initial oxidation and surface science issues.- Surface interface and valence band of ultra-thin silicon oxides.- Low temperature ultrathin dielectrics on silicon and silicon carbide surfaces: from the atomic scale to interface formation.- Interaction of O2and N2O with Si during the early stages of oxide formation.- Scanning tunnelingmicroscopy on oxide and oxynitride formation, growth and etching of Si surfaces.- The interaction of oxygen with Si(100) in the vicinity of the oxide nucleation treshold.- Section 5: Electrical properties and microscopic models of defects.- Tunneling transport and reliability evaluation in extremely thin gate oxides.- Electrical defects at the SiO2/Si interface studied by EPR.- Towards atomic scale understanding of defects and traps in oxide/nitride/oxide and oxynitride systems.- A new model of photoelectric phenomena in MOS structures: outline and applications.- Point defect generation during Si oxidation and oxynitridation.- Optically induced switching in bistable structures: heavily doped n+- polysilicon - tunnel oxide layer - n - silicon.- Heterojunction AI/SiO2/n-Si device as an Auger transistor.- Radiation induced behavior in MOS devices.- Section 6: Hydrogen/Deuterium issues.- Hydrogenous species and charge defects in the Si-SiO2system.- The role of hydrogen in the formation reactivity and stability of silicon (oxy)nitride films.- Hydrogen-induced donor states in the MOS-system: hole traps, slow states and interface states.- Section 7: New substrates (SiC,SiGe) and SOI technologies Future trends in SiC-based microelectronic devices.- The initial phases of SiC-SiO2interface formation by low-temperature (300°C) remote plasma-assisted oxidation of Si and C faces on flat and vicinal 6H SiC.- Challenges in the oxidation of strained SiGe layers.- The current status and future trends of SIMOX/SOI, new technological applications of the SiC/SOI system.- Local tunnel emission assisted by inclusions contained in buried oxides.- Authors index.- List of workshop participants.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 520 pp. Englisch.
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Published by Springer Netherlands, Springer Netherlands Mär 1998, 1998
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Buch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses ofSpringer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 524 pp. Englisch.
Language: English
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Condition: New. Print on Demand pp. 524 52:B&W 6.14 x 9.21in or 234 x 156mm (Royal 8vo) Case Laminate on White w/Gloss Lam.
