Methods of Measurement for Semiconductor Materials, Process Control, and Devices - Softcover

W. Murray Bullis

 
9780260648341: Methods of Measurement for Semiconductor Materials, Process Control, and Devices

Synopsis

This book summarizes progress made in the Joint Program on Methods of Measurement for Semiconductor Materials, Process Control, and Devices. Topics covered include techniques such as infrared methods, thermal property measurements, and wire bonding evaluation. The author covers the research and development of techniques for use throughout the electronics industry for measuring resistivity of bulk, epitaxial, and diffused silicon wafers. This book also delves into methods for studying wire bond systems in semiconductor devices, such as destructive pull testing and the impact of bonding tool motion on wire flexure. The research presented in this book is significant because it provides valuable insights into the development and refinement of measurement methods for semiconductor materials, process control, and devices, ultimately contributing to advancements in the electronics industry.

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