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Synopsis
Explore how CMOS-on-SIMOX test chips are designed for process monitoring and device parameter extraction.
This design guide describes two SIMOX-based test chips, NIST3 and NIST4. It covers why a twin-tub layout helps versatility, the kinds of structures included (MOSFETs, resistors, capacitors, interconnects, and pads), and how a general SIMOX technology file was created for CAD tools. The manual also explains how the designs are prepared for mask generation and how SIMOX designs can be converted for CMOS fabrication.
- Key structures and their purpose for process monitoring and parameter extraction.
- Use of CAD tools (Magic) and a SIMOX technology file to build and adapt layouts.
- Guidelines for outputting data for mask generation and for converting SIMOX designs to CMOS (MOSIS) formats.
- Practical steps behind placing bonding pads, aligning marks, and ensuring test structures are probe-friendly.
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The Design Guide for Cmos-on-Simox Test Chips Nist3 and Nist4 (Classic Reprint)
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The Design Guide for Cmos-on-Simox Test Chips Nist3 and Nist4 (Classic Reprint)
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HRD. Condition: New. New Book. Shipped from UK. Established seller since 2000. Seller Inventory # LX-9780266836049
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