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Synopsis
Excerpt from Semiconductor Microelectronics and Nanoelectronics Programs<br/><br/>I We have performed additional measurements of the effect of dissolved air on the refractive in dex of water at several wavelengths in the visible and UV and compared the results with predictions based on the equation of state of water and the known partial molar volumes and polarizabilities of the soluble components of air. The data and model calculations are in reasonable agreement, and demonstrate that the magnitude of the effect gets larger at shorter wavelength, up to  6.7x10'6 at 193 nm. While industry uses degassed water for immersion lithography, our results will enable any potential optical distortions due to air exposure to be modeled at the system level.
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Semiconductor Microelectronics and Nanoelectronics Programs (Classic Reprint)
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Semiconductor Microelectronics and Nanoelectronics Programs Classic Reprint
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Semiconductor Microelectronics and Nanoelectronics Programs Classic Reprint
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