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Methods of Measurement for Semiconductor Materials, Process Control, and Devices - Softcover

Quarterly Report, April 1 To June 30, 1973

 
9781528125512: Methods of Measurement for Semiconductor Materials, Process Control, and Devices

Synopsis

This book details the work done by the Joint Program on Methods of Measurement for Semiconductor Materials, Process Control, and Devices. Launched in 1968 through the combined efforts of the National Bureau of Standards, the Defense Nuclear Agency, the Defense Advanced Research Projects Agency, the U.S. Navy Strategic Systems Project Office, the Air Force Weapons Laboratory and the Atomic Energy Commission, the program's purpose was to elevate the performance and reliability of discrete semiconductor devices and integrated circuits through improved measurement methods. Split into five focused sections, this book is the product of years of research, including: resistivity, generation-recombination-trapping centers, carrier mobility, die attachment evaluation, and thermal properties of devices. It explores novel testing methods, presents new measurement techniques, and lays the groundwork for improved quality control and manufacturing processes.

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